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Case studies of electrical characterisation of graphene by terahertz time-domain spectroscopy

Whelan, Patrick R.; Zhou, Binbin; Bezencenet, Odile; Shivayogimath, Abhay; Mishra, Neeraj; Shen, Qian; Jessen, Bjarke S.; Pasternak, Iwona; Mackenzie, David M. A.; Ji, Jie; Sun, Cunzhi; Seneor, Pierre; Dlubak, Bruno; Luo, Birong; Osterberg, Frederik W.; Hu

2D MATERIALS
2021
VL / 8 - BP / - EP /
abstract
Graphene metrology needs to keep up with the fast pace of developments in graphene growth and transfer. Terahertz time-domain spectroscopy (THz-TDS) is a non-contact, fast, and non-destructive characterization technique for mapping the electrical properties of graphene. Here we show several case studies of graphene characterization on a range of different substrates that highlight the versatility of THz-TDS measurements and its relevance for process optimization in graphene production scenarios.

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